Medical	Medical
Analytical	Zeta Potential Particle Size Molecular Weight Capillary Electrophoresis Spherulite diam./Corr. Length
Spectrometry	Spectrometer Thickness Measurement Light Measurement FPD Evaluation Material Evaluation In-Process Evaluation

Medical

Medical
Analytical

Zeta Potential

Particle Size

Molecular Weight

Capillary Electrophoresis

Spherulite diam./Corr. Length
Spectrometry
Spectrometer

Thickness Measurement
- Thickness Monitor
- Thickness Monitor FE-300
- Spectrum Ellipsometer FE-5000/5000S
- Built-in film thickness monitor　FE-3
- Optical Thickness Meter OPTM series
- Line-Scan Thickness Monitor ™ (In-line type)
- Line-Scan Thickness Monitor ™ (Off-line type)
- Si Wafer Thickness Monitor
- Si Wafer Thickness Monitoring System　SF-3
Light Measurement

FPD Evaluation

Material Evaluation
In-Process Evaluation
List of Product
Discontinued Products

Optical Thickness Meter OPTM series

This instrument enables extremely precise analysis of film thickness and optical constants by measuring absolute spectral reflectance of microscopic regions.
Non-destructive and non-contact thickness measurement can be carried out on multilayered films and various coating layers including films, wafers, and optical materials.
Measurement speed is as fast as 1 second / point. Software is easy to use even for beginner users analyzing optical constants.

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Product
Specifications
Configuration

Product

Features

All functions necessary for film thickness measurements are integrated in the head
Highly accurate absolute reflectance measurement using microspectroscopy (thickness of multilayered film and optical constants)
High speed measurement of less than 1 second per point
An optical system which makes possible measurement with a wide wavelength range (UV to NIR) using microscopy
Safety mechanism with area sensors
Easy Analysis Wizard which allows anyone- even untrained operators, to carry out the analysis of optical constants without difficulty
Software program includes macro functions for customization of the measurement sequence
Various customizations are possible
Complex optical constants can also be analyzed
(multi-point analysis)
300 mm stage available

The measurement sequence can easily be customized depending on the shape and/or the position of the sample.

Measurement Items

Absolute reflectance measurement
Thickness analysis
Optical constant analysis (n: refractive index k: extinction coefficient)

Reflectance

Specifications

Type	OPTM-A1	OPTM-A2	OPTM-A3
Wavelength Range	230 nm～800 nm	360 nm～1100 nm	900 nm～1600 nm
Film Thickness Measurement Range^*	1 nm～35 μm	7 nm～49 μm	16 nm～92 μm
Sample Size^**	Max.200 mm×200 mm×17 mm
Spot Size	Φ５、Φ10、Φ20、Φ40

Notes:
　For Automatic XY stage type
　*Values are SiO₂ equivalent thickness.
　**Please contact us for consultation concerning the 300 mm stage.

Type	Automatic XY stage type	Fixed frame type	Built-in head type
Size (W×D×H)	556×566×618 mm	368×468×491 mm	210×441×474 mm 90×250×190 mm^*
Weight	66 kg	38 kg	23 kg 4 kg^*
Maximum power consumption^**	500 VA	400 VA

*Power supply unit
**Select voltage at purchase （AC 90 -110 V or 200-240 V）

Configuration

Configuration（Automatic XY stage）
Automatic XY stage

Configuration（Built-in head-type）
Built-in head-type

Product
Specifications
Configuration

Related Information

Related Product

	Thickness Monitor FE-300
	Built-in film thickness monitor　FE-3
	Spectrum Ellipsometer FE-5000/5000S