Medical	Medical
Analytical	Zeta Potential Particle Size Molecular Weight Capillary Electrophoresis Spherulite diam./Corr. Length
Spectrometry	Spectrometer Thickness Measurement Light Measurement FPD Evaluation Material Evaluation In-Process Evaluation

Built-in film thickness monitor　FE-3

Accurate multi-layer film thickness measurement which has characteristics of wavelength dependency

Product

Feature

A film thickness measurement system based on the high precision spectral interferometry
Fast Fourier Transformation (FFT) Method as an analytical algorithm (Patent No: 4834847)
Variety of measurement optics using optical fiber
Integratable for a wide variety of manufacturing equipments
Real time thickness measurement
Remote control and multi point measurement
White LED light source - long life and high stability

Measure Item

Application

Type	FE-3/40C	FE-3/200I
Principle	spectral interferometry
Thickness range(nd)	20 nm ～ 40 μm	3 μm ～ 200 μm
Wavelength range	430 nm ～ 650 nm	900 nm ～ 1600 nm
Accuracy	± 0.2 nm^*	-
Repeatability	2.1σ < 0.1nm	-
Measurement Time	0.1 s ～ 10 s
Spot diameter	Approx. φ 1.2 mm
Light source	White LED	Halogen
Optical fiber	Type Y optical fiber 1.5 ｍ～ 100 m
Size and Weight	W300 x D300 x H150mm, Approx.10 kg
Software	Peak-valley method, FFT analysis, Optimization

* To guaranteed value of VLSI thickness standard(100nm SiO₂/Si)

Single point type

Multi point type

Traversing Type

Film thickness analysis of hard coat

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